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[International Journal] Thin Film Encapsulation for Organic Light Emitting Diodes Using a Multi-barrier Composed of MgO Prepared by Atomic Layer Deposition and Hybrid Materials
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Eungtaek Kim , Yuncheol Han , Woohyun Kim , Kyung Cheol Choi , Hyeon-Gyun Im , Byeong-Soo Bae

Organic Electronics, April , 2013

Published

vol 14, no 7, pp 1737-1743

Abstract
We demonstrated an organic/inorganic multi-barrier and encapsulation for flexible OLED devices. The multi-barrier consisted of a silica nanoparticle-embedded hybrid nanocomposite, in short, S-H nanocomposite, and MgO, which were used as organic and inorganic materials, respectively. The S-H nanocomposite was spin-coated followed by UV curing. The thickness of the S-H nanocomposite was 200 nm, and 40 nm of MgO was deposited by atomic layer deposition (ALD) using Mg(CpEt)2 and H2O at 70 °C. The results of a Ca test showed that the 4.5 dyads of the MgO/S-H nanocomposite had a low water vapor transmission rate (WVTR) of 4.33 × 10−6 g/m2/day and an optical transmittance of 84%. The normalized luminance degradation of the thin film encapsulated OLED was also identical to that of glass-lid encapsulation after 1000 h of the real operation time. We proposed low temperature ALD as a deposition method to create relatively thin film for OLED passivation without degradation, such as creation of dark spots. The results confirmed that it may be feasible for our multi-barrier to passivate flexible OLEDs devices.