Nano Lithography

> Research > Nano Convergence > Nano Lithography
Research Concept
Optical lithography has been an important patterning technology owing to its precision and ease of fabrication. However, alternative lithography techniques are required as the feature size of the given electronic device decreases. Nano lithography using surface plasmons has the potential to produce
sub-wavelength resolution beyond the diffraction limit.
- Material research for surface plasmon lithography 
- FDTD simulation to verify and optimize the electric filed profiles of the proposed structures
- Fabrication and implementation of SP - lithography technique
Research Subjects